MEMS and transducer analysis   -   High frequency vibration measurements
Static deflection measurements   -   3D measurements   -  Surface profiling

 100 x 100 micrometer transducer vibrating with 5 nm amplitude at 14.3 MHz

The MEMSMap 510 is a microscopic TV-holography system which can be used on surfaces down to less than 0.1x0.1 mm (full field).  The MEMSMap 510  can be used for 3 types of measurements:

Vibration measurements up to 240 MHz or more

Static deflection measurements and 

Surface topography measurements (profiling)

The MEMSMap 510 works a similar way to the VibroMap 1000.  The MEMSMap can be used on both specular (shiny) objects and rough objects, and it can also be delivered with an option for in-plane deflection measurements (rough surfaces only for in-plane measurements).  The main applications for the Optonor MEMSMap 510 system are deformation- and vibration analysis of  microscopic structures like MEMS (Micro Electro Mechanical Systems) and transducers.

The funtionality of MEMS structures and transducers is given by their dynamic and semistatic deflection properties, and the MEMSMap 510 is a powerful tool in the development and testing of such structures.

MEMSMap 510

Deflection of MEMS pressure sensor                         Vibrating MEMS unit