MEMSMap 510



MEMS analysis
High frequency vibration measurements
Static deflection measurements
3D measurements
Surface profiling

The MEMSMap 510 is a microscopic TV-holography system which can be used on surfaces down to less than 0.1x0.1 mm (full field).  The MEMSMap 510 / MicroMap 5010 can be used for 3 types of measurements}

Vibration measurements up to 240 MHz or more

Static deflection measurements and 

Surface topography measurements (profiling)

The MEMSMap 510 works a similar way to the VibroMap 1000.  The MEMSMap can be used on both specular (shiny) objects and rough objects.  The MEMSMap 510 can also be delivered with an option for in-plane deflection measurements, but for in-plane measurements, the MEMSMap can be used on rough surfaces only.  The main applications for the Optonor MEMSMap 510 system are deformation- and vibration analysis of Micro

Many MEMS structures and transducers have their properties and functionality directly connected to their dynamic and semistatic deflection properties, and the MEMSMap 510 is a powerful tool in the development and testing of such structures.